本文在讨论了特大电流高压晶体管面临的热应力和热击穿威胁的基础上,为克服一般平面和台面工艺在制作特大容量晶体管方面所存在的困难,把业已成熟的晶闸管与功率晶体管的制造技术结合起来,提出了一种三重扩散简易挖槽工艺技术,采用这种简易三重扩散挖槽 On the basis of discussing the thermal stress and thermal breakdown threat of the ultra-high current high-voltage transistor, in order to overcome the difficulties of general planar and mesa technology in manufacturing extra-large-capacity transistors, this paper introduces the mature manufacturing technology of thyristor and power transistor In combination, a simple triple-diffusion trench technology was proposed. Using this simple triple-diffusion trench