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Nano-sheet carbon films are prepared on Si wafers by means of quartz-tube microwave plasma chemical vapour deposition (MPCVD) in a gas mixture of hydrogen and methane.The structure of the fabricated films is investigated by using field emission scanning electron microscope (FESEM) and Raman spectroscopy.These nano-carbon films are possessed of good field emission (FE) characteristics with a low threshold field of 2.6 V/μm and a high current density of 12.6 mA/cm 2 at an electric field of 9 V/μm.As the FE currents tend to be saturated in a high E region,no simple Fowler-Nordheim (F-N) model is applicable.A modified F-N model considering statistic effects of FE tip structures and a space-charge-limited-current (SCLC) effect is applied successfully to explaining the FE data observed at low and high electric fields,respectively.
Nano-sheet carbon films are prepared on Si wafers by means of quartz-tube microwave plasma chemical vapor deposition (MPCVD) in a gas mixture of hydrogen and methane. The structure of the fabricated films is investigated by using field emission scanning electron microscope (FESEM ) and Raman spectroscopy. These nano-carbon films are possessed of good field emission (FE) characteristics with a low threshold field of 2.6 V / μm and a high current density of 12.6 mA / cm 2 at an electric field of 9 V / μm . As the FE currents tend to be saturated in a high E region, no simple Fowler-Nordheim (FN) model is applicable. A modified FN model considering statistic effects of FE tip structures and a space-charge-limited-current (SCLC) effect is applied successfully to explaining the FE data observed at low and high electric fields, respectively.