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本文提出了会切磁场多极离子源中,磁场对等离子体参数以及可引出离子束流和放电室阳极收集的离子电流影响的实验研究结果,并对该结果进行了分析讨论。
In this paper, we present the experimental results of the influence of magnetic field on the plasma parameters and ion currents collected in the anode of the discharge chamber in the magnetic field multi-pole ion source. The results are analyzed and discussed.