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PIN四象限探测器在应用过程中对其输出一致性的要求很高。文章讨论了影响PIN四象限探测器输出一致性的各种因素,并有针对性地提出了相应的改进措施。通过仿真分析,对PIN器件的各项参数进行了优化设计,并制作出了可工作在1 060nm波长、50V偏压下的PIN四象限探测器,其每个象限响应度达到0.3A/W,暗电流小于50nA,四个象限输出不一致性小于10%。然后通过对单个芯片的四个象限分别进行放大电路的安装调试,制作出了输出不一致性小于3%的四象限探测器器件。
PIN four-quadrant detector in the application of its output consistency requirements are high. The paper discusses various factors that affect the consistency of PIN four-quadrant detector output, and puts forward some corresponding improvement measures. Through the simulation analysis, the parameters of the PIN device are optimized, and the PIN four-quadrant detector can be operated at a wavelength of 1060nm and bias voltage of 50V. The quadrant detector’s response per quadrant is 0.3A / W, Dark current less than 50nA, four quadrant output inconsistency less than 10%. Then four-quadrant detector devices with output inconsistency of less than 3% were fabricated by installing and adjusting the amplifying circuits on the four quadrants of a single chip respectively.