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本文主要阐述铁注入Al_2O_3陶瓷退火前后的表面电性能。应用卢瑟福背散射分析(RBS)、俄歇电子能谱分析(AES)和X-光电子能谱分析(XPS)等测试手段,研究了注入层结构、注入射程和纵向浓度分布。最后,扼要地叙述了注入层的导电机制。
This article mainly describes the surface electrical properties before and after iron-implanted Al 2 O 3 ceramics. The injection layer structure, injection range and vertical concentration distribution were studied by means of RBS, AES and XPS. Finally, the conductive mechanism of the implanted layer is briefly described.