提出一种双干涉仪绝对距离测量方法,利用参考干涉仪的误差补偿作用,有效地抑制了激光器光学特性相关误差源对外腔半导体激光器线性调频绝对距离干涉测量系统的影响,提高了测距精度。文中介绍了测量原理和实验装置,作了误差补偿分析,并给出实验结果。 A method of measuring the absolute distance of double interferometer is proposed. By using the error compensation function of reference interferometer, the effect of the error source related to the optical characteristics of the laser on the chirped absolute distance interferometer of the external cavity semiconductor laser is effectively suppressed, and the accuracy of ranging is improved. In this paper, the principle of measurement and the experimental device are introduced, the error compensation analysis is made, and the experimental results are given.