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用三坐标测量机调整掠入射光栅谱仪是我们在研制掠入射光栅谱仪中采用的新方法．我们用这种方法研制了一台曲率半径为１ｍ的光栅谱仪，在２—３２ｎｍ波段范围内，谱线分辨达０．００５ｎｍ，与通常采用的用光源摄谱调整光栅谱仪的方法相比，节省了人力、物力，缩短了研制周期．
Using a CMM to adjust the grazing incidence grating spectrometer is a new method we used in the development of grazing incidence grating spectrometer. In this method, we developed a grating spectrometer with a radius of curvature of 1m. The spectral resolution was 0.005nm in the range of 2-32nm. Compared with the commonly used method of adjusting the grating spectrometer with light source spectroscopy , Saving manpower and material resources, shortening the development cycle.