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表面微机械加工技术是实现单片集成微光学系统的一种新方法。本文介绍一种新型的采用微机械加工技术的微型光学加速度计 ,包括设计、关键器件的加工和测试 ,它是基于光线和光闸相互作用引起通光量变化的工作原理。这一微光学加速度计包含一个 2 μm厚的多晶硅光闸 ,光闸采用微弹簧支撑在基片上 ,微弹簧是长度为 2 0 0 μm的多晶硅褶曲梁 ,硅基片和微结构之间所夹的牺牲层采用氢氟酸湿法刻蚀去除。光闸设计为一个质量弹簧系统 ,对加速度力产生响应。
Surface micromachining technology is a new method to realize monolithic integrated micro-optical system. This article describes a new type of micro-optical accelerometer using micromachining technology that includes the design, processing and testing of key components and works based on the interaction of light and the shutter that causes the amount of light to pass through. The micro-optical accelerometer consists of a 2 μm-thick polysilicon shutter, supported on a substrate by a micro-spring, a polysilicon folded beam of 200 μm in length, sandwiched between the silicon substrate and the microstructure The sacrificial layer is removed by hydrofluoric acid wet etching. The shutter is designed as a mass spring system that responds to acceleration forces.