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分辨率高、操作简便是最新式Hitachi扫描电子显微镜(S—2400)的两大特点。这种新仪器有一个锥形磁极片,能在高角度进行X射线分析,从而在较短的操作距离产生较好的聚集效果,并且分辨率较高。在12毫米的EDX位置上分辨率达5.5毫微米,与常规的120毫微米分辨率和35毫米操作距离相比,表明其性能有了惊人的改善。操作距离短能够提高扫描电镜的分辨率,而且,即使用大的高度倾斜的样品,X射线分析用背散射照相也不产生位移。S—2400电镜上的一些高级自动装置,例如焦距、消象散聚焦、
High resolution and easy operation are two characteristics of the latest Hitachi scanning electron microscope (S-2400). The new instrument has a tapered pole piece that performs X-ray analysis at high angles resulting in better aggregation at shorter operating distances and higher resolution. With a resolution of 5.5 nanometers at a 12-mm EDX location, this shows a dramatic improvement over conventional 120-nanometer resolution and 35-millimeter operating distances. The short operating distance increases the resolution of the SEM, and the backscatter for X-ray analysis does not shift even with large, highly tilted samples. S-2400 electron microscope on some advanced automatic devices, such as focal length, erasing astigmatic focus,