由于铍薄膜极易被X射线穿透,传统的几何模式下很难获得有效的X射线衍射应力分析结果.本文采用掠入射侧倾法分析SiO2基底上Be薄膜残余应力,相比其他衍射几何方法,提高了衍射的信噪比,获得的薄膜应力拟合曲线线形较好.对Be薄膜的不同晶面分析,残余应力结果相同,表明其力学性质各向同性;利用不同掠入射角下X射线的穿透深度不同,获得应力在深度方向上的分布;由薄膜面内不同方向的残余应力相同,确定薄膜处于等双轴应力状态. As the beryllium thin film is easily penetrated by X-ray, it is difficult to obtain the effective X-ray diffraction stress analysis results in the traditional geometric mode.In this paper, grazing incidence roll method is used to analyze Be film residual stress on SiO2 substrate. Compared with other diffraction geometry methods , The diffraction signal-to-noise ratio was improved, and the curve of the film stress fitting curve obtained was better.For the different crystal plane analysis of Be film, the residual stress results were the same, indicating that the mechanical properties were isotropic; Different depths of penetration, the distribution of stress in the depth direction is obtained. The same residual stress in different directions in the film plane confirms the biaxial stress state of the film.