综合测试台是以测量离子泵抽速为主的专用设备。变换某些附件,便可兼校测真空量具和标准漏孔。适合电子管制造业计量部门小批量、多品种的计量特点,并能减少专用设备对厂房和资金的占用。双规小孔法测抽速,与泵口直径相同的管状试验罩、试验罩中部小孔隔板将其分隔成上、下两室。因为小孔的直径比试验罩直径小得多,所以上室的气体分子运动情况接近麦克斯韦分布,故上室存在平衡压强P_1。下室情况则不然。许多人通过模拟计算证明,如能恰当安排下室规管的位置,仍能使管状试验罩等价于大试验罩。使用式 Integrated test bench is to measure the ion pump pumping speed based special equipment. Transform some of the accessories, and can be calibrated vacuum gauge and standard leaks. For the tube manufacturing industry measurement department small batch, multi-species measurement features, and can reduce the dedicated equipment, plant and capital occupation. Double-orifice method to test the pumping speed, and the pump port diameter of the same tubular test cover, the middle of the test cover hole partition to be separated into upper and lower chambers. Because the diameter of the orifice is much smaller than the diameter of the test hood, the movement of gas molecules in the upper chamber is close to the Maxwellian distribution, so that there is an equilibrium pressure P_1 in the upper chamber. The next room is not the case. Many people through the simulation proved that if the proper regulation of the location of the next room, still can make the tubular test cover equivalent to a large test cover. Use type