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提出了一种基于静态膨胀法的极小漏率校准方法。该方法通过测量被校漏率离子流上升率及四极质谱计校准系数实现校准。实验发现,10-10Pa·m3/s量级极小漏率的离子流上升率重复性良好;采用混合气体二级膨胀能有效降低复杂膨胀过程对四极质谱计校准系数重复性引入的测量不确定度。通过对一支10-10Pa·m3/s真空漏孔的校准实验,证明基于静态膨胀法的极小漏率校准方法有效可行。当进一步减小校准室容积时,该方法能够实现10-13Pa·m3/s量级极小漏率的校准。
A method of minimum leakage rate calibration based on static expansion method is proposed. The method is calibrated by measuring the rise rate of ion fluxes at the rate of missed leaks and the quadrupole mass spectrometer calibration coefficients. It was found that the rate of increase of ionic current with minimum leakage rate of 10-10 Pa · m 3 / s is reproducible. The secondary expansion of mixed gas can effectively reduce the complex expansion process. The measurement of quadrupole mass spectrometer calibration coefficient repeatability is not introduced Determine the degree. Through a calibration experiment of a 10-10 Pa · m 3 / s vacuum leak hole, it is proved that the minimum leak rate calibration method based on the static expansion method is feasible and effective. This method enables calibration of a very small leak rate of the order of 10-13 Pa · m 3 / s when the calibration chamber volume is further reduced.