以化学组成ZnO∶A l2O3=98∶2%的混合粉体为原料,采用热压烧结制备AZO靶材。研究了热压工艺条件对靶材致密化的影响。结果表明,热压温度与压力上升,靶材致密度增大;在AZO靶材的致密化过程中存在“反致密化”现象,这是由于连通气孔的合并与生长及闭合气孔率的升高引起的。在实验条件范围内,在热压工艺条件压力18 MPa、温度1150℃、保温保压时间90 m in下,制备了AZO靶材。通过SEM观察热压靶材的断面形貌,阿基米德法测量靶材密度,水银压汞仪测量靶材的平均孔径及孔径分布,XRD测定靶材相结构,四探针测定电阻率等方法对AZO靶材的性能进行了分析表征,结果表明:结构为六方纤锌矿,密度为5.39.gcm-3,靶材连通气孔率为0.05%,闭合气孔率为3.4%,电阻率为5.3×10-4Ω.cm。采用射频溅射制备AZO薄膜,对靶材的使用性能及AZO薄膜性能进行了分析,表明靶材使用寿命大于150 W.h,薄膜在可见波段的平均透过率达到85.5%,电阻率达到3.1×10-4Ω.cm,满足薄膜太阳能对透明导电薄膜性能的要求。 AZO target material was prepared by hot pressing sintering with mixed powder ZnO: Al 2 O 3 = 98: 2% as the raw material. The effect of hot pressing process on the densification of target was studied. The results show that the hot pressing temperature and pressure increase, the target density increases; there is “densification” phenomenon in AZO target densification process, which is due to the merger and growth of connected stomata and the closed porosity Caused by the rise. AZO targets were prepared under the conditions of hot pressing, pressure 18MPa, temperature 1150 ℃ and holding pressure 90min. SEM was used to observe the cross-sectional morphology of the hot-pressed target, the target density was measured by Archimedes method, the average pore diameter and pore size distribution of the target was measured by mercury porosimetry, the phase structure was determined by XRD, the resistivity was measured by four probes The results show that the structure is hexagonal wurtzite, the density is 5.39.gcm-3, the target porosity is 0.05%, the closed porosity is 3.4% and the resistivity is 5.3 × 10-4Ω.cm. The AZO thin films were prepared by radio frequency sputtering. The properties of the target and the properties of the AZO films were analyzed. The results show that the lifetime of the target is more than 150 Wh. The average transmittance of the films reaches 85.5% in the visible wavelength range and the resistivity reaches 3.1 × 10 -4Ω.cm, to meet the thin film solar energy performance requirements of transparent conductive film.