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研制成功了三种结构的具有管型电子倍增器的电离规,企图解决低到10~(-14)托的压强测量问题。新型倍增器在极高真空测量中的应用,为解决10~(-13)~10~(15)托的测量难题提供了新的可能。
Three types of ionization gauges with tube-type electron multipliers were successfully developed in an attempt to solve pressure measurement problems down to 10 to -14 Torr. The application of the new type of multiplier in the ultra-high vacuum measurement provides a new possibility to solve the measurement problem of 10 ~ (-13) ~ 10 ~ (15) torches.