研究出一种智能化的表面粗糙度检测仪,其纵向分辨率为0.3nm,横向分辨率为1.27μm,测试重复精度为0.5nm。该仪器不仅可以给出待测表面的二维截面图和三维形貌图,还能提供各种纵向、横向以及综合粗糙度评定参数值。本文描述了它的测量原理及设计中的关键技术,并对测量结果作了误差评述。 Developed an intelligent surface roughness tester with a vertical resolution of 0.3nm, a horizontal resolution of 1.27μm and a test repeatability of 0.5nm. The instrument can not only give the two-dimensional cross-section and three-dimensional topography of the surface to be measured, but also provide a variety of vertical, horizontal and integrated roughness assessment parameters. This paper describes its measurement principle and key technologies in the design, and makes error comments on the measurement results.