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运用多弧离子镀在Ｗ６Ｍｏ５Ｃｒ４Ｖ２ 高速钢表面沉积了（Ｔｉ，Ａｌ）Ｎ 镀层，并经ＳＥＭ、ＸＲＤ 和ＥＤＳ等方法分析表明，多靶联合工作获得的（Ｔｉ，Ａｌ）Ｎ 镀层，其成分可连续变化，随弧流增大，铝含量增多；随负偏压增大，铝含量降低．弧流与偏压二者对镀层的成分均有影响，其中弧流较为显著．ＸＲＤ分析表明，镀层除（Ｔｉ，Ａｌ）Ｎ 相外，还有（Ｔｉ２ ，Ａｌ）Ｎ 相和Ａｌ２Ｏ３ 等相，且随铝含量的增加，（Ｔｉ，Ａｌ）Ｎ 相的（１１１） 峰减弱，（２００） 面逐渐成为其择优生长晶面．当镀层中铝含量较低时，失效以粘着磨损为主；铝含量较高时，失效以磨粒磨损为主，因此可以通过控制铝含量来提高镀层的耐磨性．
The (Ti, Al) N coatings were deposited on the surface of W6Mo5Cr4V2 high speed steel by multi-arc ion plating. The results of SEM, XRD and EDS showed that the (Ti, Al) With the increase of arc current, the content of aluminum increases. With the increase of negative bias, the content of aluminum decreases. Both the arc current and the bias voltage have an influence on the composition of the coating, and the arc current is more significant. XRD analysis showed that the (Ti, Al) N phase and the Al2O3 phase were present in addition to the (Ti, Al) N phase. The (111) peak of the (Ti, Al) (200) surface gradually become its preferred growth plane. When the content of aluminum in the coating is low, the failure is mainly adhesive and wear. When the content of aluminum is higher, the failure is abrasive wear, so the wear resistance of the coating can be improved by controlling the content of aluminum.