论文部分内容阅读
为了解决潮湿对半导体激光器的危害,采用真空气相沉积工艺制备了用于半导体激光器的新型保护膜,即聚对二甲苯(parylene)涂敷膜。探讨了工艺条件对N型和C型parylene薄膜质量的影响。分别使用椭偏仪、紫外分光光度计测试膜的吸收系数和反射系数,研究了parylene薄膜对半导体激光器出光性能的影响。在808 nm半导体激光器上涂覆厚度为1.65μm的parylene膜,24 h的湿热和盐雾环境实验结果表明,半导体激光器性能优于未涂覆parylene膜半导体激光器的性能。Parylene膜对半导体激光器起到了很好的保护作用,腔面基本完好,提高了半导体激光器的稳定性和可靠性。
In order to solve the damaging effect of damp on semiconductor lasers, a new type of protective film for semiconductor lasers, that is, a parylene coating film, is prepared by a vacuum vapor deposition process. The effect of process conditions on the quality of N-type and C-type parylene films was discussed. Ellipsometer and UV spectrophotometer were used to test the absorption coefficient and reflection coefficient respectively. The effect of parylene film on the performance of semiconductor laser was studied. The parylene film with a thickness of 1.65 μm was coated on a 808 nm semiconductor laser. The results of 24 h wet heat and salt spray show that the performance of the semiconductor laser is better than that of the uncoated parylene film semiconductor laser. The Parylene film protects the semiconductor laser very well, and the cavity surface is basically intact, which improves the stability and reliability of the semiconductor laser.