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研究了有衬底影响的类金刚石碳（ＤＬＣ）膜硬度测定技术。采用Ｈ－Ｄ关系外推、Ｍｅｙｅｒ图计算及Ｊ¨ｏｎｓｓｏｎ－Ｈｏｇｍａｒｋ公式计算（考虑ＩＳＥ）等三种方法测定了ＤＬＣ膜的“真实”硬度。结果表明，由Ｍｅｙｅｒ图计算的薄膜硬度最可靠、简便。通过试验还发现ＤＬＣ膜有约１５％的弹性恢复，并认为ＤＬＣ膜的硬度测定采用克努普压头更为恰当。
The hardness measurement of diamond-like carbon (DLC) film with substrate influence was studied. The “true” hardness of DLC films was determined by H-D extrapolation, Meyer graph calculation and J¨sson-Hogmark formula calculation (considering ISE). The results show that the hardness calculated by Meyer diagram is the most reliable and simple. The test also found that about 15% of DLC film elastic recovery, and that the hardness of DLC film using Knud’s overpressure is more appropriate.