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本文讨论了用于计量圆光栅的超微粒乳胶的基本性质,用光学传递函数求光学系统和把感光面看作一个整体时的性能,定量地给出感光材料的光学传递函数。对于提高计量圆光栅的刻划精度及表面质量有一定的实际意义。
In this paper, we discuss the basic properties of ultrafine particles latex used to measure circular gratings. The optical transfer function is used to determine the optical system and the performance of the photosensitive surface as a whole. The optical transfer function of the photosensitive material is given quantitatively. It is of practical significance for improving the scoring accuracy and surface quality of the measuring circular grating.