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A novel technology to manufacture holographic ion beam etched diffraction gratings based on surface thermokinematics is presented. The surface roughness of photoresist gratings is solved by this technology. According to this technology,a holographic ion beam etched blazed grating of 1200 l/mm for use in the ultraviolet region is manufactured. The experimental results show that the grating has good surface quality,low stray light and high diffraction efficiency. In addition,the performance of thes gratings satisfies the operating requirements of ultraviolet spectrograph.
A novel technology to manufacture holographic ion beam etched diffraction gratings based on surface thermokinematics is presented. According to this technology, a holographic ion beam etched blazed grating of 1200 l / mm for use in the experimental results show the the grating has good surface quality, low stray light and high diffraction efficiency. the addition of the performance of the gratings satisfies the operating requirements of ultraviolet spectrograph.