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高精度面形检测系统是同步辐射光源、大型天文望远镜等领域X射线反射镜面的重要检测仪器。为了满足第三代光源及自由电子激光对X射线反射镜面的检测需求,由光学元件加工缺陷引入的系统误差必须得到减小或消除。基于法线追迹原理设计了新型的角度检测系统,在该系统中,小孔及光源组成光束选择装置用于自动选择一束沿待测镜面测量点处法线方向传播的光束。通过测量该光束角度的变化完成对待测镜面面形的检测。将系统中光学元件紧贴小孔放置,减小或消除由相应光学元件加工缺陷引入的角度测量误差。采用法线追迹原理在大角度范围内实现高精度角度检测。
High-precision surface detection system is synchrotron radiation light source, large astronomical telescope and other fields of X-ray reflection mirror important testing equipment. In order to meet the third-generation light source and free electron laser X-ray reflection mirror surface detection needs, optical components processing defects introduced by the system error must be reduced or eliminated. A new angle detection system is designed based on the principle of normal trace. In this system, the hole and light source beam selection device is used to automatically select a beam that propagates along the normal direction at the measurement point of the mirror to be measured. By measuring the change of the beam angle to complete the detection of the mirror surface to be measured. Place the optical components in the system close to the holes to reduce or eliminate the angle measurement errors introduced by the defects of the corresponding optical components. Using the principle of normal trace in high angle range to achieve high-precision angle detection.