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在第二代高温涂层导体离子束辅助沉积技术(IBAD)路线中,LaMnO_3(LMO)作为超导层的生长面,直接影响到YBCO的性能,为改善LMO的织构、形貌等,对磁控溅射法制备的LMO薄膜进行了后退火处理,本实验系统研究了后退火处理对LMO物相、织构、表面形貌等的影响,并进一步研究了后退火效应对超导层的影响.结果表明后退火处理有助于改善LMO表面形貌,优化LMO微结构,在潮湿Ar-5%H2气氛下,LMO缓冲层改善率最高,在经湿Ar-5%H2后退火处理的LMO缓冲层上制备的超导层具有最佳的性能,在77K自场下,临界电流密度达到1.2 MA/cm~2.
In the second generation IBAD route, LaMnO_3 (LMO) as the growth surface of the superconducting layer has a direct impact on the performance of YBCO. In order to improve the texture and morphology of LMO, The LMO thin films prepared by magnetron sputtering have been annealed. The effect of post-annealing on the phase, texture and surface morphology of LMO has been systematically studied. The effects of post-annealing on the superconducting layers .The results show that post-annealing treatment can improve the surface morphology of LMO and optimize the microstructure of LMO. Under the humid atmosphere of Ar-5% H2, the improvement rate of LMO buffer layer is the highest. After annealing with wet Ar-5% H2 The superconducting layer prepared on the LMO buffer layer has the best performance. At 77K, the critical current density reaches 1.2 MA / cm ~ 2.