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为实现地基拼接式大口径望远镜主镜整体面形连续性,提出了一种新方法,对拼接子镜的相互位置误差进行高精度检测,并进行相关校正,从而使望远镜取得或接近于其衍射极限的光学成像质量。拼接子镜间需要进行校正的位置误差包括子镜间的倾斜误差和垂向平移误差,其中子镜之间的垂向平移误差需要被校正到100 nm以下,相当于入射光波长的几分之一。为实现此目标,在基于迈克耳孙干涉原理的基础上设计出一套相位误差检测系统,应用He-Ne激光与白光作为其光源系统,对拼接主镜子镜间相位误差进行高精度检测,同时解决了垂向平移误差的λ/2相位模糊性问题。系统的不确定度为8～10 nm,检测范围为45～60μm。对系统的设计进行了分析,并仿真出基于该检测系统的理论干涉图形,得出理想的检测结果。
In order to realize the overall surface continuity of the main mirror of the large-diameter telescopic telescope, a new method is proposed to detect the position error of the splicing sub-mirror with high-precision and correlate it so that the telescope can obtain or approximate its diffraction The ultimate optical imaging quality. Positional errors that need to be corrected between splicer mirrors include tilt errors and vertical translation errors between sub-mirrors, where the vertical translation error between sub-mirrors needs to be corrected to below 100 nm, a fraction of the wavelength of the incident light one. In order to achieve this goal, a phase error detection system based on the Michelson interference principle is designed. He-Ne laser and white light are used as the light source system to detect the phase error of the spliced master mirror with high accuracy. Meanwhile, Solve the vertical translation error λ / 2 phase ambiguity problem. The uncertainty of the system is 8 ~ 10 nm and the detection range is 45 ~ 60 μm. The design of the system is analyzed, and the theoretical interference pattern based on the detection system is simulated to obtain the ideal test result.