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本文报道了用于超导TES(Transition Edge Sensor)测辐射热计的Al/Ti双层薄膜制备及其超导特性研究.通过分析Al薄膜表面粗糙度和室温电阻率在不同溅射功率和氩气压力下的变化关系,优化了Al薄膜的制备工艺.使用磁控溅射技术生长了一系列不同厚度的Al/Ti双层薄膜,在氦三制冷机中测量了双层膜的超导特性.测试结果表明,Al/Ti双层薄膜具有良好的超导相变特性,在10μA测试电流下,其相变宽度保持在3mK~6mK范围内,在超导临界温度下电阻对温度的灵敏度参量α在300左右;由于超导邻近效应(Proximity effect),双层薄膜的临界温度可以通过控制Ti薄膜的厚度实现在470mK~800mK温区内的调节.Al/Ti双层薄膜的这些性能满足了制备超导TES测辐射热计的需要.
This paper reports the preparation and superconducting properties of Al / Ti bilayer films used in the transition edge sensor bolometer.Through analyzing the surface roughness of Al films and the room-temperature resistivity at different sputtering powers and argon Gas pressure, the preparation process of Al thin films was optimized.A series of Al / Ti bilayers with different thicknesses were grown by magnetron sputtering and the superconducting properties of bilayers were measured in a helium-three refrigerator The results show that the Al / Ti bilayer film has good superconducting phase transition characteristics, and its phase transition width is maintained within the range of 3mK ~ 6mK at a current of 10μA. The sensitivity of the resistance to temperature at the superconducting critical temperature α is about 300. Due to the Proximity effect, the critical temperature of the bilayer film can be adjusted in the 470mK ~ 800mK temperature range by controlling the thickness of the Ti film. These properties of the Al / Ti bilayer film satisfy The need to prepare superconducting TES bolometers.