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采用预先脱去结晶水的醋酸锌和硝酸铬为前驱体,乙二醇甲醚为溶剂,乙醇胺为稳定剂,乙酰丙酮为络合剂的溶胶-凝胶法(sol-gol),在Pt/Ti/SiO2/Si衬底上制备了ZnO∶Cr薄膜。通过对醋酸锌样品进行了热分析,醋酸锌在135℃脱去全部结晶水。利用X射线衍射仪(XRD)对薄膜的结构进行了分析表明ZnO及ZnO∶Cr薄膜呈现(002)取向生长,随着Cr的掺入增加ZnO薄膜的取向度降低。利用SEM对薄膜的断面进行了测试。磁性能测试表明,Cr掺杂ZnO薄膜室温下具有微弱的铁磁性,饱和磁化率为3.57×10-5emu/cm-3矫顽场为80 Oe。
A sol-gel method was developed by using sol-gel with zinc acetate and chromium nitrate as precursors, ethylene glycol monomethyl ether as a solvent, ethanolamine as a stabilizer and acetylacetone as a complexing agent, Ti / SiO2 / Si substrate prepared ZnO: Cr film. By the thermal analysis of zinc acetate samples, zinc acetate at 135 ℃ off all the crystal water. The structure of the films was characterized by X-ray diffraction (XRD). The results show that the ZnO and ZnO:Cr films grow in (002) orientation and the orientation degree of ZnO films decreases with the addition of Cr. The cross section of the film was tested using SEM. Magnetic tests show that the Cr-doped ZnO thin films have weak ferromagnetism at room temperature, and the saturation magnetization is 3.57 × 10-5emu / cm-3 and the coercive field is 80 Oe.