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风机过滤单元(Fan Filter Unit,简称FFU)是一种模块化的末端净化装置,以其结构紧凑、布置灵活等特点,在洁净室中被广泛应用。针对FFU不同工况下的性能进行测试,分析其能耗变化规律。研究表明,在变工况条件下可根据FFU能耗性能特征,调整群控策略,以实现节能运行。针对不同FFU样品的能耗性能的评价,应同时考虑初始能耗性能指数及使用过程中的能耗增长率两个因素,加以综合判断。在产品的选择以及运行策略的制定方面对于FFU的设计、制造及使用提出指导建议。
Fan Filter Unit (FFU) is a modular end purification device, which is widely used in cleanroom due to its compact structure and flexible layout. The performance of FFU under different operating conditions is tested, and its variation of energy consumption is analyzed. The research shows that under the condition of variable working conditions, the group control strategy can be adjusted according to the energy consumption performance characteristics of FFU in order to achieve energy-saving operation. According to the evaluation of the energy consumption performance of different FFU samples, the factors of initial energy consumption performance index and the energy consumption growth rate in the process of application should be taken into consideration simultaneously to be comprehensively judged. Suggest guidance on the design, manufacture and use of FFUs in product selection and operation strategy development.