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据《北京科技情报》报道:为了满足我国大规模集成电路发展的需要,北京化工厂化学试剂研究所从1978年开始研制的MOS级化学试剂,经用户一年多的试用,受到欢迎,被誉为“质量信得过”的产品。今年4月已通过批量生产技术鉴定。这套化学试剂包括冰乙酸、硫酸、硝酸、盐酸、氢氟酸、磷酸、过氧化氢、氢氧化铵、40%的氟化铵溶液、氟化铵浸蚀剂、甲醇、无水乙醇、异丙醇、乙二醇、丙酮、甲苯、二甲苯、乙酸乙酯、乙酸丁酯、二氯甲烷、三氯乙烯、环乙烷等22个MOS级产品。
According to “Beijing Science and Technology Intelligence” report: In order to meet the needs of the development of large-scale integrated circuits in China, Beijing Chemical Industry Institute of Chemical Reagents MOS-based chemical reagents developed since 1978, the user more than a year trial, was welcomed For the “quality of trust” products. This year in April has passed mass production technology appraisal. The chemical reagents include glacial acetic acid, sulfuric acid, nitric acid, hydrochloric acid, hydrofluoric acid, phosphoric acid, hydrogen peroxide, ammonium hydroxide, 40% ammonium fluoride solution, ammonium fluoride etchant, methanol, 22 MOS products such as propanol, ethylene glycol, acetone, toluene, xylene, ethyl acetate, butyl acetate, methylene chloride, trichlorethylene and cyclohexane.