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静电力反馈微加速度计在突然受较大加速度冲击后出现振荡失效,严重影响工作可靠性。为查明失效原因、优化设计以保证全工作范围内稳定性,研究了系统动特性随外界加速度的变化。将静电刚度引入以分析失效原因,并根据分析结果提出模拟控制器的改进方案。SIMULINK对比仿真的结果和电测法对比实验的结果确认了对失效原因的判断,验证了改进方案的可行性。工程实际中,该文提出的分析与优化方法可以指导此类加速度计的可靠性设计,通过选择合理的控制器网络形式和参数,避免加速度计受冲击后振荡失效。
Electrostatic force feedback micro-accelerometer in a sudden impact by a large acceleration after the oscillation failure, seriously affecting the reliability of the work. In order to find out the cause of failure and optimize the design to ensure the stability in the whole working range, the dynamic characteristics of the system with the acceleration of the outside world were studied. The electrostatic stiffness is introduced to analyze the cause of failure. Based on the analysis results, an improved scheme of the simulation controller is proposed. SIMULINK comparison simulation results and electrical test results confirm the comparison of the causes of failure to judge, to verify the feasibility of improving the program. In engineering practice, the analysis and optimization methods proposed in this paper can guide the reliability design of such accelerometers. By choosing a reasonable network form and parameters of the controller, the accelerometer can be prevented from losing its vibration after impact.