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本文叙述了锰、钻、镍等氧化物半导体测辐射热计(又称热敏电阻红外探测器)的工作原理和功能参数,制造方法和器件性能。详细介绍了使用者感兴趣的实验数据和试验结果,如该器件的电阻温度特性,响应温度特性,光谱特性,响应率与灵敏面积的0.8次方反比关系,功率入照度在10~(-7)-10~(-1)W/mm~2之间的线性响应,10W/mm~2的损伤阈值,8.3×10~4小时的工作寿命等等。研制成的固体衬底型、锗浸没型、组合型三种热敏电阻红外探测器,它们的敏感元线度可在0.1-2.0mm间选择,时间常数在2-15毫秒之间,探测器基本上受热噪声限制,探测率在1×10~8-4×10~8cm·H_Z~(1/2)/W之间,与美国Barnes工程公司同类产品性能相当。这些器件已分别在卫星姿态控制、火车热轴检测、输电线接点过热检查、气体流量测定、激光接收与监控及其他多种红外测温仪表上使用多年,实践证实该器件使用方便,性能稳定可靠。
This paper describes the working principle and functional parameters, manufacturing methods and device performance of the oxide semiconductor pyrometer (also known as thermistor infrared detector) of manganese, diamond and nickel. Details of the experimental data and the experimental results are of interest to the user, such as the inverse relationship between the resistance temperature characteristic, the response temperature characteristic, the spectral characteristic, the response rate and the sensitive area of the device, and the power input illuminance is between 10 and -7 ) -10 ~ (-1) W / mm ~ 2 linear response, 10W / mm ~ 2 damage threshold, 8.3 × 10 ~ 4 hours of working life and so on. Developed solid substrate type, germanium immersion type, combination of three kinds of thermistor infrared detectors, their sensitivity element linearity can choose between 0.1-2.0mm, the time constant between 2-15 milliseconds, the detector Basically by the thermal noise limit, the detection rate of 1 × 10 ~ 8-4 × 10 ~ 8cm · H_Z ~ (1/2) / W between, and the United States Barnes Engineering similar performance of similar products. These devices have been used for many years in satellite attitude control, train hot shaft inspection, overheat inspection of transmission line contacts, gas flow measurement, laser receiving and monitoring, and other various infrared thermometers, and have proved that the devices are easy to use and have stable and reliable performance .