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本文研究了以半导体材料砷化镓霍尔器件与高性能稀土永磁材料构成的小位移传感器及其检测电路，推导了位移量与霍尔电势的关系，建立了传感器的数学模型，并对非线性和温度误差进行了理论分析，在传感器的设计上实现了变换器与变换电路的一体化封装。经实际应用证明，传感器可分辨的最小位移变化量为０．１μｍ，本测量系统切实可行，有一定的推广应用价值。
In this paper, a small displacement sensor consisting of a gallium arsenide semiconductor device with high performance rare earth permanent magnet material and its detection circuit are studied. The relationship between the displacement and the Hall potential is deduced. The mathematical model of the sensor is established. Linearity and temperature error were analyzed theoretically, the sensor design of the converter and transform the integrated circuit package. Proved by practical application, the sensor can distinguish the minimum displacement variation of 0.1μm, the measurement system is feasible and has some promotion and application value.