论文部分内容阅读
本文报道了MOCV D技术制备的SnO_2薄膜型气敏元件。这种方法沉积的3nO_2薄膜耐酸碱性强,膜厚易控制,具有负温阻特性。测定了不同温度和不同气体条件下元件的特性,发现该元件对乙醇、丙酮气体具有较高的灵敏度,响应时间快;而对氢气、乙烯、煤气、液化石油气等不敏感,因而具有一定的选泽性。元件的稳定性较好。
This paper reports the SnO2 thin film gas sensor fabricated by MOCVD technique. The 3nO 2 film deposited by this method has strong acid and alkali resistance, easy to control film thickness and negative temperature resistance. The properties of the components under different temperatures and different gas conditions were measured and found to have high sensitivity to ethanol and acetone gases and fast response time, while not sensitive to hydrogen, ethylene, gas, liquefied petroleum gas, etc., Selected Ze. The stability of the components is better.