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在玻璃基片上射频溅射50 nm厚的金膜,然后利用TiO2胶体溶液在金膜表面制备了厚度约为320 nm的TiO2纳米多孔薄膜.以此双层膜为漏模光波导芯片,构建了基于Kretschmann结构的波长调制型光波导漏模共振(LMR)传感器.利用扫描电子显微镜(SEM)观测了TiO2纳米多孔薄膜的表面和横截面形貌.实验研究了在纳米多孔光波导中给定漏模的共振波长及折射率灵敏度与入射角的依赖关系.结果表明,随着入射角的增大,共振波长逐渐蓝移,折射率灵敏度随之下降.此外,与传统的表面等离子体共振(SPR)传感器进行了对比,结果表明在相同的共振波长下,纳米多孔光波导LMR传感器折射率灵敏度大于SPR传感器.
A 50 nm-thick gold film was sputtered on a glass substrate, and then a TiO2 nanoporous film with a thickness of about 320 nm was prepared on the surface of the gold film using TiO2 colloidal solution. Based on Kretschmann structure, a wavelength-modulated optical waveguide leakage mode resonance (LMR) sensor was used to observe the surface and cross-section morphology of TiO2 nanoporous films by scanning electron microscopy (SEM) Mode resonance wavelength and the dependence of refractive index sensitivity on the incident angle.The results show that as the incident angle increases, the resonant wavelength gradually shifts blue and the refractive index sensitivity decreases. In addition, compared with the traditional surface plasmon resonance (SPR ) Sensor. The results show that under the same resonance wavelength, the refractive index sensitivity of nanoporous waveguide LMR sensor is greater than that of SPR sensor.