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康宁的Photocor技术能在一块玻璃基片上集成光波导,这种技术通过玻璃上的光刻蚀法和离子交换,适宜于大规模生产高性能的分支器件。光无源器件须经多道工序生产。首先,在一块光学性能均匀的玻璃板上沉积掩模材料,然后采用光刻蚀工艺在掩模上设计出所需的图形,再把玻璃基片浸入盐槽里,通过掩模图形形成的缝隙与盐交换离子。这种交换引起局部的折射率改善,在玻璃基片的表面形成一个半圆形的波导。去掉掩模之后,进行第二次离子交换。原先形成的波导就变成近似圆形并迁移进玻璃基片。已为50/125μm多模光纤制作了1:2和1:8耦合器形式的光波导,并对其作过测量。1:2耦合器的附加
Corning’s Photocor technology integrates optical waveguides on a single glass substrate. This technology is suitable for mass production of high-performance branching devices through photolithography and ion exchange on glass. Optical passive devices to be produced by many processes. First, a mask material is deposited on a glass plate with uniform optical properties, and then the desired pattern is designed on the mask using a photolithographic process. The glass substrate is then immersed in a salt bath and passed through the mask pattern Exchanging ions with salt. This exchange causes a partial improvement in the refractive index, forming a semi-circular waveguide on the surface of the glass substrate. After removing the mask, a second ion exchange is performed. The originally formed waveguide becomes approximately circular and migrates into the glass substrate. Optical waveguides in the form of 1: 2 and 1: 8 couplers have been fabricated for 50/125 μm multimode fibers and measured. 1: 2 Coupler attachment