Study on a MEMS silicon-based non-silicon mirror for an optical switch

来源 :Chinese Optics Letters | 被引量 : 0次 | 上传用户:SAGDGJGU
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A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10° at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches. A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10 ° at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
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