论文部分内容阅读
在声表面波工艺中,原图位置误差对器件性能的影响是显著的,已经报导了用解析法和模拟法对器件性能与制造公差关系所作的研究,结果表明造成指位误差的一个重要原因是刻图误差。分析了一般手工刻图的误差原因,认为研制适于SAW刻图特点的控制机改造手工刻图以提高刻图精度是十分必要的。本文扼要介绍了SKK-1型刻图控制的结构及主要指标。讨论了试刻图中存在的若干问题及对原图误差的影响。说明了试刻线条的取样方法给出了测量结果,试用的结果表明刻图的相对和绝对误差值均为微米量级。
In the SAW process, the influence of the position error of the original image on the performance of the device is remarkable. The research on the relationship between the device performance and the manufacturing tolerance has been reported by using the analytical method and the simulation method. The results show that an important cause of the pointing error Is the engraving error. This paper analyzes the error reason of general hand-engraving, and thinks that it is very necessary to develop hand-engraving to improve engraving precision which is suitable for SAW engraving. This article briefly introduces the SKK-1 type engraved control structure and the main indicators. The paper discusses some problems existing in the trial chart and the influence on the original chart error. It shows that the sampling method of the test line gives the measurement results, and the trial results show that the relative and absolute error values of the chart are in the order of microns.