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本文提出一种在轴向发射式电离机构基础上发展成的新型自调式超高真空电离规。它是采用自调制技术改变离子收集效率来消除剩余光电流的。它较短收集极BA式自调制规具有灵敏度高(11托~(-1)),零散性小等特点。本文给出了规管在两种不同离子收集效率工作状态下的实验结果和加速极的电子流分布情况。该规管结构简单,测量上限为5×10~(-4)托。在无调制情况下软X射线光电流本底为1.5×10~(-11)托。在自调制工作条件下其可测下限约为2×10~(-12)托。
This paper presents a new type of self-adjusting ultra-high vacuum ionization gauge developed on the basis of axial emission ionization mechanism. It is the use of self-modulation technology to change the ion collection efficiency to eliminate residual photocurrent. It has a shorter collector pole BA-type self-regulation regulations with high sensitivity (11 torr ~ (-1)), scattered small and so on. This paper presents experimental results governing the operation of two different ion collecting efficiencies and the electron current distribution at the accelerating electrode. The regulatory structure is simple, the maximum measurement limit of 5 × 10 ~ (-4) care. The soft X-ray photocurrent background is 1.5 × 10 ~ (-11) Torr without modulation. Under self-modulation working conditions, the lower limit of its measurement is about 2 × 10 ~ (-12) Torr.