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短波长、高光子能量的Ar F准分子激光在集成电路光刻、材料加工、激光医学等领域具有重要的应用。结合线宽压窄技术方案设计了193 nm Ar F准分子激光器复合腔结构,理论分析了复合腔结构能量提升的原理。针对准分子激光器的长腔特性,提出了实现其复合腔窄带激光模式锁定的解决方案,并进行了实验验证。与通常插入色散元件的单窄带腔相比,锁定后的准分子激光复合腔在输出线宽基本不变的情况下能量提高了4.02倍,激光效率大幅提升,能量稳定性也大幅优化。
Ar F excimer lasers with short wavelength and high photon energy have important applications in the field of integrated circuit lithography, material processing and laser medicine. The 193 nm Ar F excimer laser cavity structure was designed in combination with the scheme of linewidth narrowing and the principle of the energy enhancement in the composite cavity was theoretically analyzed. Aiming at the cavity characteristics of excimer laser, a solution to realize the narrow-band laser mode locking in the composite cavity is proposed and verified by experiments. Compared with the single narrow-band cavity, which usually has the dispersive element inserted, the energy of the locked excimer laser cavity increases by 4.02 times when the output linewidth is basically the same, the laser efficiency is greatly improved, and the energy stability is also greatly optimized.