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设计了一款应用于MEMS麦克风的电荷泵电路。在动态的电荷传输开关型电荷泵中,增加了时钟电平倍增电路和负反馈电路,使得电荷泵在工艺偏差、温度以及电源电压变化时能够输出稳定的高压。电路基于0.3μm CMOS工艺实现,Spectre仿真结果表明,在1.6~3.6V电源电压范围及所有工艺角下,电荷泵能够输出偏差在±5%以内的14V高压,与相同条件下的传统静态电荷传输型电荷泵相比,升压单元减少了33%,有效提高了效率,节省了面积。
Designed a charge pump circuit for MEMS microphones. In the dynamic charge-transfer switch-type charge pump, the clock level multiplication circuit and the negative feedback circuit are added so that the charge pump can output a stable high voltage when the process deviation, the temperature and the power supply voltage vary. The circuit is based on a 0.3μm CMOS process. Specter simulation results show that the charge pump can output a 14V high voltage within ± 5% of the 1.6V to 3.6V supply voltage range and all process angles. Compared with traditional static charge transfer under the same conditions, Compared to the charge pump type, the boost unit is reduced by 33%, which effectively improves the efficiency and saves the area.