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将均质多层膜系设计中的缓冲层概念引入到反射导模共振滤光片的设计中,以研究缓冲层的增加对导模共振滤光片反射光谱特性的影响。设计并通过严格的耦合波理论计算了一、二、三、四通道导模共振反射滤光片光谱特性。在膜系设计中增加缓冲层后,随着其厚度的逐渐增加,反射光谱中依次出现二、三、四个窄带反射峰;缓冲层厚度为796.35 nm时,当滤光片光栅层占空比在0.2~0.9范围内、光栅深度在100~200 nm变化时,共振峰的位置、反射率峰值高度几乎不变,保持了很好的多通道滤光片特性。
The concept of buffer layer in homogeneous multi-layer film design was introduced into the design of the reflection-mode resonant filter to study the influence of the buffer layer on the reflection spectral characteristics of the guided-mode resonant filter. The spectral characteristics of one, two, three, four-channel guided-mode resonant reflection filters are designed and calculated by the strict coupled-wave theory. After the buffer layer is added in the membrane system design, with the increase of its thickness, there are two, three and four narrowband reflection peaks in the reflection spectrum. When the buffer layer thickness is 796.35 nm, when the duty cycle of the grating layer When the grating depth varies from 100 to 200 nm in the range of 0.2 to 0.9, the position of the formant and the peak reflectance remain almost the same, maintaining good multi-channel filter characteristics.