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为了满足对中等精度的微机械加速度计的需求，讨论了一种硅片溶解法制造的平面叉指式加速度计，其敏感轴平行于检测质量平面。为了分析该种加速度计的分辨率和固有频率，分析了其机械模型和数值解，并且用有限元方法对几种设计尺寸进行了仿真。着重研究了几个关键尺寸，如检测质量厚度和梁的宽度的改变对分辨率和固有频率的影响，并且给出了此种结构在当前条件下的所能得到的测量分辨率极限。最后，给出了两种尺寸的设计，其大小约为１．５ｍｍ×１．５ｍｍ，检测质量厚１０μｍ和１５μｍ，相对于当地重力加速度，分辨率分别为５×１０－３和３×１０－３。
In order to meet the need for a medium accuracy micromachined accelerometer, a planar interdigital accelerometer fabricated by silicon dissolution is discussed, with its sensitive axis parallel to the proof mass plane. In order to analyze the resolution and natural frequency of the accelerometer, the mechanical model and numerical solution are analyzed. Several design dimensions are simulated by the finite element method. Emphasis is placed on the impact of several critical dimensions, such as the thickness of the proof mass and the width of the beam, on the resolution and natural frequency, and gives the limits of measurement resolution that such a structure can achieve under current conditions. Finally, the design of two sizes is given, the size is about 1.5mm × 1.5mm, the detection mass is 10μm and 15μm, the resolution is 5 × 10-3 and 3 × 10- 3.