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介绍了硅光子互连中4种波分复用器及相关单片集成发射接收芯片,其中硅纳米线阵列波导光栅及刻蚀衍射光栅波分复用器单个芯片就可以成倍扩展通道数,非常适合大通道数密集波分复用,马赫-曾德尔结构及微环谐振型波分复用器芯片通道数增大时需要多个单元级联,波长准确性及间隔不易控制,比较适合通道数少的芯片应用。同时,给出了自主设计和制备的硅纳米线阵列波导光栅和刻蚀衍射光栅,通过采用阵列波导展宽方法,有效抑制了阵列波导的串扰,实现串扰小于-15 d B;通过在刻蚀衍射光栅反射面引入二维光子晶体反射镜,降低了刻蚀衍射光栅的反射损耗,损耗比普通刻蚀衍射光栅减小了3 d B。
Four WDMs and related monolithic transmit / receive chips in silicon photonic interconnection are introduced. The number of channels can be doubled by a single chip of silicon nanowire arrayed waveguide grating and etched diffraction grating wavelength division multiplexer, Very suitable for a large number of channels Dense Wavelength Division Multiplexing, Mach-Zehnder structure and the micro-ring resonator type WDM chip channel number requires multiple cascaded units, the wavelength accuracy and spacing is not easy to control, more suitable channel Few chip applications. At the same time, the self-designed and prepared silicon nanowire arrayed waveguide grating and etched diffraction grating are proposed. By using the array waveguide broadening method, the crosstalk of the arrayed waveguide is effectively suppressed, and the crosstalk is less than -15 dB. The introduction of two-dimensional photonic crystal mirrors into the reflecting surface of the grating reduces the reflection loss of the etched diffraction grating with a loss of 3 d less than that of the conventional etched diffraction grating.