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利用LCD作为加工掩模,采用波长为1 064 nm的纳秒脉冲激光进行液晶掩模加工试验研究。讨论了液晶掩模对激光的调制作用,并且通过试验研究了液晶掩模加工图形特点和液晶损伤的阈值,测得了液晶掩模损伤阈值。观察液晶掩模的加工形貌发现,图形线条呈现边缘没有烧蚀而内部发生烧蚀的现象,其原因是由于黑栅遮光引起的边框效应和黑色像素的光透射率较高。结果表明:液晶掩模能够通过调节光的透射率实现遮掩效果,激光能量对液晶掩模具有破坏作用,液晶掩模的激光损伤阈值约为2.5 J/cm2;激光能量密度在0.6～0.8 J/cm2之间时能够加工出完整的图形。
Using LCD as a processing mask, a nanosecond pulsed laser with a wavelength of 1064 nm was used to fabricate a liquid crystal mask. The modulating effect of the liquid crystal mask on the laser is discussed. The threshold of liquid crystal mask processing pattern and liquid crystal damage is experimentally studied, and the damage threshold of the liquid crystal mask is measured. Observation of the morphology of the liquid crystal mask found that the pattern lines showed no ablation at the edges and internal ablation due to the border effect caused by the black-out and the high light transmittance of the black pixels. The results show that the masking effect of the liquid crystal mask can be achieved by adjusting the transmittance of light, the laser energy has a damaging effect on the liquid crystal mask, the laser damage threshold of the liquid crystal mask is about 2.5 J / cm2, the laser energy density is 0.6-0.8 J / cm2 can be processed between the complete graphics.