研究了微陀螺的电容变化率为１０－７～１０－８时的微弱输出信号的检测技术，这是微机械器件研制中具有普遍性的技术难点。在研究检测微小电容变化量的积分电路的基础上，进一步采用了可抑制低频噪声和漂移的相关双采样技术，以及抑制由开关的电荷注入引起的误差的技术。 The detection technology of the weak output signal when the rate of change of capacitance of the gyroscope is 10-7 ~ 10-8 has been studied, which is a common technical difficulty in the development of micromechanical devices. On the basis of research on the integral circuit which detects the change of the small capacitance, the correlated double sampling technique which can restrain the low frequency noise and drift and the technique of suppressing the error caused by the charge injection of the switch are further adopted.