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一、前言 因Nb_3Ge具有高的Tc、Jc、Hc_2和低的损耗等优良特性,广为世界各国科学工作者所注意。而CVD法又是制备实用高温超导体Nb_3Ge有希望的方法。因此在采用CVD法合成高温超导体Nb_3Ge的过程中,要涉及到铌、锗的氯化和NbCl_4、GeCl_2的氢还原反应。所以研究此反应的热力学条件具有一定的理论意义和实际价值。C.F.Wan等做过Nb-Ge-H-Cl体系的平衡CVD相图。表明在该体系中热力学平衡的复杂性和单相Nb_3Ge平衡沉积对CVD参数的敏感性。
I. Preface Due to the excellent properties of Nb_3Ge such as high Tc, Jc, Hc_2 and low loss, it is widely used by scientists all over the world. The CVD method is also a promising method for preparing practical high temperature superconductor Nb_3Ge. Therefore, the use of CVD synthesis of high-temperature superconductors Nb_3Ge process, it involves the niobium, germanium chlorination and NbCl_4, GeCl_2 hydrogen reduction reaction. Therefore, it is of theoretical and practical significance to study the thermodynamic conditions of this reaction. The balanced CVD phase diagram of the Nb-Ge-H-Cl system has been done by C. F. Van et al. It shows the complexity of thermodynamic equilibrium in this system and the sensitivity of single phase Nb_3Ge equilibrium deposition to CVD parameters.