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本文利用传质原理的菲克扩散定律，描述了扩散泵的抽气过程，提出了抽气特性计算的理论模型．同时，利用该模型导出了有关性能参数的计算公式并讨论了提高抽速的途征．
In this paper, the Fick diffusion law of mass transfer principle is used to describe the process of gas diffusion in diffusion pump, and the theoretical model of calculation of gas extraction characteristics is proposed. At the same time, the formula for calculating the performance parameters was derived and the way to improve pumping speed was discussed.