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本文介绍了一种基于ARM微控制器的真空测量及控制系统。系统由ARM微控制器、ADC采集电路、CAN通讯接口、HM-TRP无线收发模块、上位机和真空规组成。将其应用于四极杆质谱仪,能同时测量接口、离子传输和四极杆三个部分的真空度,并据此实现了仪器单元的级联控制和仪器的流程控制;同时,将各个部分的真空度上传至上位机显示以及通过无线模块传送至显示终端进行显示和控制。将该系统应用于钢研纳克检测技术有限公司的PlasmaMS 300仪器,实验表明,该系统能准确且稳定地实时监测仪器的真空度,确保了仪器的正常工作及关键部件的安全;同时,部件间的级联控制和整机流程控制进一步提高了仪器的自动化程度和可靠性。
This article describes a vacuum measurement and control system based on ARM microcontrollers. System consists of ARM microcontroller, ADC acquisition circuit, CAN communication interface, HM-TRP wireless transceiver module, PC and vacuum gauge. Applying it to the quadrupole mass spectrometer, the vacuum degree of the interface, ion transport and quadrupole can be measured at the same time, and then the cascade control of the instrument unit and the flow control of the instrument are realized. Meanwhile, The degree of vacuum uploaded to the host computer display and sent to the display terminal through the wireless module for display and control. The system is applied to the PlasmaMS 300 instrument of Steel Research & Development Co., Ltd. The experiments show that the system can accurately and stably monitor the vacuum degree of the instrument in real time, and ensure the normal operation of the instrument and the safety of the key components; at the same time, the components Between the cascade control and machine flow control to further improve the degree of automation and reliability of the instrument.