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本文根据我所红外及光电器件研制工艺中对离子注入的特殊要求,注入机的现有性能及本所技术力量和特色,对LC—2A型注入机离子源、注入能量低(几keV—几百keV)和红外表面测温、低温靶室等方面作出改进考虑和试验以期扩大和改进原有注入机功能。
In this paper, according to our infrared and optoelectronic devices developed in the process of ion implantation of the special requirements of the existing performance of the injection machine and the technical strength and characteristics of the LC-2A-type ion source, the injection of low energy (a few keV- 100 keV) and infrared surface temperature measurement, low temperature target room to make improvements to consider and test with a view to expanding and improving the original injection machine function.