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溶液法印刷制备电子器件因具有绿色环保、低成本、流程简单、柔性好和适应性强等优良特性,受到世界各个国家的重视,尤其高性能薄膜晶体管是平板显示和消费电子行业的基石,更成为了研究的热点。本文综述了基于溶液法氧化物薄膜晶体管印刷制备的最新研究进展,详细讨论了印刷氧化物薄膜晶体管结构优化、半导体层材料、电极层材料和绝缘层材料以及相关前驱体选择等,指出了提升器件性能的关键,明确了器件后处理与稳定性的关系。最后,本文总结了氧化物薄膜晶体管在印刷制备和应用过程中存在的问题以及发展前景。
Due to its good characteristics such as environmental friendliness, low cost, simple process, good flexibility and adaptability, the solution-printed electronic devices are valued by all countries in the world. In particular, high performance thin film transistors are the cornerstone of flat panel display and consumer electronics industry. Has become a research hot spot. In this paper, the recent research progress on the preparation of oxide thin film transistor based on solution method is reviewed. The structure optimization of printed oxide thin film transistor, the selection of semiconductor layer material, electrode layer material, insulating layer material and related precursors are discussed in detail. The key performance, a clear post-processing and stability of the relationship between the device. Finally, this paper summarizes the problems and prospects of the oxide thin film transistor in the process of printing preparation and application.