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空气静压轴承由于具有摩擦小、寿命长、适于各种复杂环境的优点,因而已在各种精密机床、仪器与导航仪器及医疗器械、半导体设备等方面得到了日益广泛的应用。尤其是空气静压球轴承,由于它能承受径向和轴向载荷并可获得较高的回转精度,因而可作为高精度机床的主轴支承和高精度测量仪表的回转元件。它可使轴向跳动精度达到0.01μm,径向回转精度达0.05μm以上。但是这种轴承的设计计算及加工比较复杂,采用何种结构形式,如何计算工作参数,怎样加工精密球形零件,必须认真加以
Due to its advantages of small friction, long life and suitable for various complicated environments, aerostatic bearings have been widely used in various precision machine tools, instruments and navigation instruments, medical devices and semiconductor devices. Especially aerostatic ball bearings, due to its ability to withstand radial and axial load and high rotational accuracy, it can be used as a high-precision machine tool spindle support and high-precision measuring instruments of the rotating components. It can make the axial runout accuracy of 0.01μm, radial rotation accuracy of more than 0.05μm. However, this bearing design calculation and processing more complex, what structure used, how to calculate the working parameters, how to process precision spherical parts, we must seriously