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渗层易产生孔洞,是长期困扰气体渗硼发展的主要问题之一。本文通过对渗硼孔洞的电子探针扫描和气体渗硼的热力学分析证实:在BCl_3+H_2渗硼气氛中,孔洞主要是由Fe-Cl产物组成,气氛中的残留H_2O、O_2加剧了产物的形成。严格控制气氛中残留H_2O、O_2含量不仅可有效地防止孔洞的形成,而且可大幅度降低BCl_3用量。此外还讨论了B.Cl_2的扩散特点及温度对孔洞形成的影响。
Permeable layer easy to produce holes, is long plagued the development of gas boron infiltration one of the major issues. In this paper, the electron probe scanning of boronizing holes and the thermodynamic analysis of gas boriding confirmed that the pores are mainly composed of Fe-Cl products in the boronizing atmosphere of BCl 3 + H 2 and the residual H 2 O and O 2 in the atmosphere aggravate the form. Strict control of the atmosphere of residual H_2O, O_2 content can not only effectively prevent the formation of holes, but also significantly reduce the amount of BCl_3. In addition, the diffusion characteristics of B.Cl_2 and the influence of temperature on the formation of pores were also discussed.